Highest performance of customized soft X-ray, EUV and XUV optics.
Performance.
Highest performance of customized
EUV, soft X-ray and XUV optics.
Growth
Growth.
optiX fab has invested $20 million
in its new facility @ Loftfabrik JENA.
Careers - We are hiring!
Careers.
We are hiring! Send your CV to
jobs@optixfab.com.

About us

EUV, soft X-ray and XUV mirrors – made by optiX fab

optiX fab GmbH was founded as a Fraunhofer IOF spin-off on August 1st, 2013.

Located in Jena, the City of Light, optiX fab designs, develops and fabricates EUV illumination and collector optics and coats EUV imaging optics.

optiX fab is currently supplying chipmakers, EUV tool and source manufacturers as well as institutes, universities, synchrotron beamlines and EUV research consortia worldwide with customized multilayer and grazing incidence optics for EUV lithography applications at 13.5 nm and the entire soft X-ray and XUV spectral range from 1 to 100 nm (10 eV to 1 keV).

EUV, soft X-ray and XUV mirrors – made by optiX fab

Extreme ultraviolet (EUV)
mirrors for 13.5 nm

Standard mirrors
Customized mirrors

Soft X-ray mirrors

(1 nm … 13.5 nm / 1 keV … 100 eV)
Customized mirrors
Applications

XUV mirrors

(13.5 nm … 100 nm / 10 eV … 100 eV)
Customized mirrors
Applications

XUV mirrors

(13.5 nm … 100 nm / 10 eV … 100 eV)
Customized mirrors
Applications

Careers

Working at optiX fab.

optiX fab. is a place for inspiration to push physical limits within a growing and highly motivated team.

You have a background in physics or engineering and you are interested in creating EUV/XUV multilayer optics?

We are hiring! We would love to welcome you to our team.

Send your CV to jobs@optixfab.com

Working at optiX fab.

News

October 8, 2024

optiX fab is honored to be part of KLA’s network of distinguished suppliers and are proud to be recognized with KLA’s Excellence in Technology award.

October 4, 2022

After two years of intensive planning, construction and reconstruction, optiX fab’s new facilities (2,500 square meters lab and office space, including 250 square meters ISO 5 cleanroom) are fully operational.

July 17, 2024

Funding for Research, Technology, and Innovation (FTI) – Thuringia Support Program

Contact

You have questions?
Get in touch!

headquarters

Otto-Schott-Straße 41
07745 Jena | Germany

e-mail

info@optixfab.com

phone

+49 3641 310580

Contact

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